EXHIBITOR LISTING

[ Japanese ]

MS: Manufacturing Strategy and Management

OMRON Corporation Omron will provide innovative new approach of MEMS business model which integrate solutions from the semiconductor process to the packaging.
Other companies have not yet to reach this point.
Customer wants this solution for a long time and Omron can cooperate to realize.

MC: Manufacturing Control and Execution

System V, Inc. EES (Equipment Engineering System) advocated from Selete in 2003 does not stop only at collection of detailed equipment data and is going into the stage of actual operation system such as EEQA (Enhanced Equipment Quality Assurance) and EEQM (Enhanced Equipment Quality Management). EDPMS has many experience as a TDI (Tool Data Interface), and has grown to be the "life cycle support system" of semiconductor equipment. We will explain the functional outline of EDPMS and demonstrate example of analysis method.

PO: Process and Material Optimization

Applied Materials Japan Inc. Lithography support technologies of Applied Materials
TCAD International,Inc TCAD International, Inc., will exhibit a TCAD system "TiSSiEN" that optimizes semiconductor manufacturing process.
In the semiconductor manufacturing industry, TCAD (Technology Computer Aided Design) system is widely used as a system to obtain the optimum processing conditions. TCAD system introduces physical model into various problems such as ion-implantation, diffusion, oxidization, deposition, etching and stress to execute numerical simulations.
For example, impurity dopant profile after ion-implantation process can be simulated precisely using Monte Carlo method.
Toray Research Center, Inc. Since 1978, Toray Research Center, Inc. has been serving to a wide range of customers with a variety of advanced analytical techniques and expertise. LSI relating analyses account for our major business because tiny defects or trace level contamination can devastate the products. For this kind of purpose, you need an adequate combination of skillful specimen preparation and highly developed analytical technique. We will show you our unique analytical technology for LSI production process.

YE: Yield Enhancement Methodology

International Test & Engineering Services Co., Ltd. ITES Co.,Ltd. was founded, based on the Quality assurance organization of IBM Yasu on 1993. ITES provides the failure analysis, material analysis and reliability evaluation services for advanced semiconductor and display products by the excellent technologies.
PDF Solutions, Inc. PDF Solutions presents its unique methodolgy of combining Fault Detection & Classification (FDC) methodology to Yield Management System (YMS). FDC and YMS tools have traditionally been regarded as different solutions addressing separate yield-loss mechanisms. While FDC tools focus on real-time (on-line) detection of manufacturing equipment parameter excursion, YMS tools have traditionally been used as an off-line tool to identify root causes of yield loss based on correlations of final die (IC) yield. This approach resulted in the creation of data "islands" within the fab. Integrating equipment trace data with product and process data using advanced FDC and YMS software will provide comprehensive and fast analysis capabilities to resolve equipment-based product yield loss. The integrated YMS-FDC solution improves the prevention of yield excursions by "feeding-backward" YMS data to the FDC software to optimize fab equipment control strategies, as well as shortens the time to identify the root-cause of a yield loss mechanism by "feeding-forward" FDC data to the YMS software.
Raytex Corporation Back Scan with Optical Review system combine automates wafer backside inspection with the 3D confocal imaging profiler. With the Optical review up to 150-fold magnification, it is now possible to perform a root cause analysis of the back side defects without destructive inspection, supporting users in reducing the amount of time required to identify the various backside defects that may be causing the problem. We are pleased to introduce you to our latest products on the day.

We have developed a maskless exposure system using a digital micromirror device (DMD) as an exposure pattern generator. The fundamental principle of this system is reduced projection of an exposure pattern displayed on a DMD, but it is also equipped with a positioning function using microscope observation of alignment marks, and a unique auto focus function which allows application even to thin transparent substrates, as well as a data conversion tool which accommodates general-purpose CAD dataAenhancing usability.
Yamatake Corporation Yamatake provide comprehensive EES solutions with matured technologies in process industries.
YDC Corporation YDC SONAR© is the specialized package solution developed for yield analysis for Semiconductor and FPD manufacturing industry. YDC SONAR© consists of ETL Tool(Data loading tool=TORAJA), DWH(Data Ware House) and Client Analysis functions. This year, we will have on display Trend Monitoring, High-Speed Map analysis, Data Mining, Web Report, SQC, and SPC option. Also, we will update you on our enhanced functions of our solution upon your request. We would like to take this opportunity for your start of evaluation of YDC SONAR©.

PE: Process and Metrology Equipment

Canon ANELVA CORPORATION Canon Anelva provides PVD and RIE systems which are based on unique vacuum technology that are indispensable for semiconductor manufacturing processes. And we exhibit Clean Room Air Monitor M-1600AC that is a high sensitivity ion chromatography clean room gas monitor, which use pure water to absorb the air in clean room.
Fujikin Incorporated We'll exhibit High-speed valve, High-durability valve, High-temperature valve, High-flow valve etc. for critical process. Regarding MFC's, Fujikin will exhibit high performance MFC's such as PI-MFC and Pressure based flow controller.

UC: Contamination Control and Ultraclean Technology

Nihon Entegris K.K. „Torrento™ Plus 3000 15nm disposable filter for single wafer cleaning „"NT®6510" Integrated Flow Controller „"IntelliGen© Mini" photochemical dispense system „"Impact©2-Duo", "Impact©2 V2 Asy 5nm" filters for photochemical „"Luminousgard 2000" Hydrocarbon purifiers/filters for inert gas and CDA „"Wafergard SL 1.125" w-seal" gas filter for process gas/CDA „450mm Single Wafer Shipper
Nihon Pall Ltd. Laser particle counter has reached the limitation for particles less than 30nm in size due to their very low counting efficiency at these small sizes.
Hence, the particle removal performance of the filters for 45 and 32nm process required from ITRS roadmap, can not be determined with these particle counters.
Pall has developed a novel rating method using gold nanoparticle. We would like to show you the brief method and the actual filter performance. Furthermore, we are pleased to introduce you to our products for photolithography process and wet process.

ES: Environment, Safety and Health

Kanken Techno Co., Ltd. Kanken Techno is located in Kyoto where is the birthplace of the Kyoto Protocol and is enjoying the leading anti-air pollution equipment company in Japan. Our various patented abatement technologies can apply for almost all hazardous gases and PFC gases from semiconductor, LCD and PV factories with high DRE. Our abatement system (Local Scrubber) requires electricity, water and N2 only. Our abatement system (Local Scrubber) can treat CF4, SF6, C2F6, C3F8, N2O,NF3, etc., which are known as PFC gases with 90%[*1] or more of DRE based on IPCC guide line 2006. If customer requires, we would guarantee higher DRE[*2 ]. We will surely contribute to your environmental protection measures. [*1] NF3 is 95% or more [*2] Subject to discuss detailed gas recipe etc.

DM: Design for Manufacturing

Co-Exhibitor
Intersoft. Co. Ltd. EM-Suite by Panoramic Technology Inc, USA, performs 3D rigorous FDTD simulation. Suitable for lithography, defect analysis, mask design. Rigorous vector imaging can be achieved in air, liquid immersion , multi layered thin film. Applications: Resist (3D exposure/diffusion/reaction/develop), Immersion Lithography, OPC mask design, Inspection machines, PSM, EUV Masks and more.
Hardware Acceleration makes Up to 10X Speed-Up of FDTD calculation, Works with SimRunner which is parallel execution on network of accelerated systems.
Siborg Systems Inc Our primary product is MicroTec: software for semiconductor process and device simulation. MicroTec is an excellent tool for a practical use by process engineers in a fab environment. MicroTec brakes traditional barrier between state-of-the-art TCAD tools widely used in semiconductor industry and educational use of these hard-to-use software tools. Due to its simplicity MicroTec is widely accepted by educational institutions. On the other hand MicroTec possesses most of the conventional TCAD tools' capabilities making it an indispensable tool for process engineers.
Our latest activity is Smart Tweezers: Digital Multimeter specifically designed for use in Surface Mount Technology. It has a unique patented design integrating tweezers with a miniature measuring unit and display. It is a unique one-hand held device for small SMT component handling and unrivaled identification tool.