Tutorial Speaker
Fan-Tien Cheng
Chair Professor
Department of Computer Science and Information Engineering / Institute of Manufacturing Information and Systems
National Cheng Kung University, Taiwan, R.O.C.
Biography
Fan-Tien Cheng received his B.S. degree from National Cheng Kung University (NCKU), Taiwan, ROC (1976), his Master's (1982) and Ph.D. (1989) degrees from The Ohio State University, USA, all in Electrical Engineering. Currently, He is currently Chair Professor of NCKU. His research interests include Semiconductor Manufacturing Automation, e-Manufacturing, Virtual Metrology, and Intelligent Predictive Maintenance. He has founded the e-Manufacturing Research Center (eMRC) at NCKU since Jan. 2008 and, currently, serves as the Director of eMRC.
Professor Cheng won Best Automation Paper Awards at IEEE ICRA (1999 & 2013).
He also received Outstanding Industry-University-Cooperation (IUC) Award from Ministry of Education, ROC (2003); NCKU Distinguished IUC-Professor Awards (2004 & 2008); ROC National Science Council (NSC) Outstanding IUC Award (as the only awardee in 2006); ROC NSC Outstanding Research Award for three times (2006, 2009, 2013); University Industry Economy Contribution Award from Ministry of Economic Affairs (MOEA), ROC (2008); TECO Award from TECO Technology Foundation, ROC (2010); 2011 National (Silver) Invention and Creation Award from MOEA, ROC, 2011 Award for Outstanding Contributions in Science and Technology from Executive Yuan, ROC; 2012 National (Gold) Invention and Creation Award from MOEA, ROC, 2013 IEEE Inaba Technical Award for Innovation Leading to Production, 2014 Pan Wen Yuan Foundation Outstanding Research Award, ROC, and 2014 K.-T. Li Science and Humanities Chair, ROC.
Professor Cheng is a Fellow of IEEE.
Presentation Title
Tutorial on Applying the VM Technology for TFT-LCD Manufacturing
Abstract
In the high-tech industries, on-line quality monitoring on each workpiece under processing is required to ensure process stability and improve yield rate. However, conducting workpiece-by-workpiece actual metrology is very expensive and time-consuming. n this case, a novel idea is to use "virtual metrology" (VM) that conjectures workpiece quality based on process data collected from production equipment with a slight supplement of actual metrology data. The purpose of this tutorial is to select the thin film transistor-liquid crystal display (TFT-LCD) manufacturing processes as the illustrative examples for demonstrating the methodology of fab-wide implementation of the VM technology systematically. In the tutorial, the features of an effective and refined VM system are presented with the Automatic Virtual Metrology (AVM) system developed by the speaker as a case study, followed by introduction of the TFT-LCD production tools and manufacturing processes. After that, the generic deployment schemes of the VM technology for the TFT-LCD tools are proposed. Finally, illustrative examples with the AVM system as a case study are presented to show how the VM technology applies to TFT-LCD manufacturing fab-wide.
Eisuke Toyoda
Azbil Corporation
Marketing Department Advance Automation Company
Biography
Education:
1987 -1991
Kogakuin University
Bachelor of Engineering
Career History:
1991- Yamatake-Honeywell Component Division Sales Department
1998- Yamatake-Honeywell changes its name to Yamatake Corporation
2002- Yamatake Corporation Component Division Marketing Department
2012- The names of existing companies in Japan change to include "Azbil."
2014- Azbil Corporation Advance Automation Company Marketing Department Group Manager
Presentation Title
The new direction for providing effective data for EES from sensors and digital controllers
Abstract
I present a new direction of sensing and controlling device capable of providing additional value for EES to realize more and more effective VM models and fault detection models not only reliable and accurate control.
