Highlight Theme 2012
Monday, October 15
Highlight Session : Process Control Solution
-Invited Talk-
Prof. Costas J. Spanos
Andrew S. Grove Distinguished Professor
Department of Electrical Engineering and Computer Sciences, University of California, Berkeley
The Realities of Virtual Metrology
This talk will examine Virtual Metrology - the art of leveraging "free" information in order to reduce the dependence on costly and time consuming wafer measurements. Doing it right involves managing statistical as well as economical attributes of the process in question. Those will be highlighted through examples in data mining, dimensionality reduction, model building and maintenance; the focus is on the creation of formal decision support tools to facilitate the rational and optimal application of virtual metrology into modern semiconductor manufacturing lines.
Tuesday, October 16
Invited Talk : 3DIC
Morihiro Kada
Association of Super-Advanced Electronics Technologies(ASET)
3D-Integrated Circuits Technologies-The History and Future-
Highlight Session : Printed Electronics
-Invited Talk-
Dr. Tsuyoshi Sekitani
Research Associate, Quantum Phase Electronics Center and Department of Applied Physics, School of Engineering, The University of Tokyo
All-printed organic transistors for large-area, flexible electronics
Recent research progress and future prospects of printed, flexible electronics for next-generation'ambient human/machineinterfaces, utilizing molecular electronic material-based thin-film transistors, is reviwed. Especialy, here we described thefabrication of large-area, flexible active matrix organic LED pixel circuit on 10µm thin-film plastics. The circuit that applies printedfloating-gate organic transistors can compensate LED brightness variations and degradation for more than 6 months. The 230×230mm2 printed active matrix circuit comprises 64×64 screen-printed organic 2-transistor-1-capacitor cells.
Takayuki Ogawa
Tsukuba Research Laboratory, Harima Chemicals Inc.
Conductive paste for Flexible electronic application
In recent years, touch screen panel market has been rapidly expanding as mobile devices become increasingly popular. Touch screen panel is mainly formed by transparent electrode which detects a signal from the external and metal wiring which drives the transparent electrode on the flexible circuit. The conductive pastes applied to the metal wiring were continuously developed by optimization of matrix polymer and conductive filler. The newly developed conductive paste enabled the formation of the fine pattern with 50μm width on PET film by screen printing. Moreover, in the case of gravure offset printing, we have succeeded to pattern the 40 μm line by controlling the affinity between the conductive paste and blanket roll.
Wednesday, October 17
Invited Talk : Power Device
Hiroaki Sumitani
Mitsubishi Electric
Recent progress of SiC power device
For the realization of the low-carbon society, development of energy-saving and new energy technology are demanded. A power electronics technology was a key technology for energy saving, and the continuous improvement in performance of the Si power device has been accomplished. The SiC power device surpasses a Si power device by its physical properties. Recent years, the development of the power device using SiC became popular, and part of product which applied SiC power device came up in the market. In this presentation, I will report the progress of SiC power device and power module which applied SiC power device.
Highlight Session: BCP ( Business Continuity Plan )
-Invited Talk-
Kenichi Takamatsu
Managing director of Environmental Div, Oki Engineering
On-site Earthquake Early Warning System for Semiconductor plant
On-site Earthquake Early Warning System (On-site EEW) has been developed to minimize the damage of semiconductor manufacturing plant. In addition, we created effective warning system against epicentral earthquake by improved the calculation methods. This system was able to minimize the damage at The 2008 Iwate Miyagi Nairiku Earthquake, further was functioned effectively in The 2011 off the Pacific coast of Tohoku Earthquake.
Using this system is able to shut down special gases, chemicals and to stop production before S-wave arrival. In business continuation program, On-site EEW is effective to reduce the damage and protect the lives of employee.