チュートリアルスピーカー

Fan-Tien Cheng　氏

Fan-Tien Cheng Chair Professor
Department of Computer Science and Information Engineering / Institute of Manufacturing Information and Systems
National Cheng Kung University, Taiwan, R.O.C.

Biography

Fan-Tien Cheng received his B.S. degree from National Cheng Kung University (NCKU), Taiwan, ROC (1976), his Master's (1982) and Ph.D. (1989) degrees from The Ohio State University, USA, all in Electrical Engineering. Currently, He is currently Chair Professor of NCKU. His research interests include Semiconductor Manufacturing Automation, e-Manufacturing, Virtual Metrology, and Intelligent Predictive Maintenance. He has founded the e-Manufacturing Research Center (eMRC) at NCKU since Jan. 2008 and, currently, serves as the Director of eMRC.
Professor Cheng won Best Automation Paper Awards at IEEE ICRA (1999 & 2013). He also received Outstanding Industry-University-Cooperation (IUC) Award from Ministry of Education, ROC (2003); NCKU Distinguished IUC-Professor Awards (2004 & 2008); ROC National Science Council (NSC) Outstanding IUC Award (as the only awardee in 2006); ROC NSC Outstanding Research Award for three times (2006, 2009, 2013); University Industry Economy Contribution Award from Ministry of Economic Affairs (MOEA), ROC (2008); TECO Award from TECO Technology Foundation, ROC (2010); 2011 National (Silver) Invention and Creation Award from MOEA, ROC, 2011 Award for Outstanding Contributions in Science and Technology from Executive Yuan, ROC; 2012 National (Gold) Invention and Creation Award from MOEA, ROC, 2013 IEEE Inaba Technical Award for Innovation Leading to Production, 2014 Pan Wen Yuan Foundation Outstanding Research Award, ROC, and 2014 K.-T. Li Science and Humanities Chair, ROC. Professor Cheng is a Fellow of IEEE.

Presentation Title

Tutorial on Applying the VM Technology for TFT-LCD Manufacturing

Abstract

In the high-tech industries, on-line quality monitoring on each workpiece under processing is required to ensure process stability and improve yield rate. However, conducting workpiece-by-workpiece actual metrology is very expensive and time-consuming. n this case, a novel idea is to use "virtual metrology" (VM) that conjectures workpiece quality based on process data collected from production equipment with a slight supplement of actual metrology data. The purpose of this tutorial is to select the thin film transistor-liquid crystal display (TFT-LCD) manufacturing processes as the illustrative examples for demonstrating the methodology of fab-wide implementation of the VM technology systematically. In the tutorial, the features of an effective and refined VM system are presented with the Automatic Virtual Metrology (AVM) system developed by the speaker as a case study, followed by introduction of the TFT-LCD production tools and manufacturing processes. After that, the generic deployment schemes of the VM technology for the TFT-LCD tools are proposed. Finally, illustrative examples with the AVM system as a case study are presented to show how the VM technology applies to TFT-LCD manufacturing fab-wide.

豊田　英輔　氏

豊田　英輔アズビル株式会社
アドバンスオートメーションカンパニー　マーケティング部制御管理2グループ　グループマネージャー

Biography

1991年3月に工学院大学工学部卒業、同年4月に山武ハネウエル株式会社入社。
制御機器事業部本社販売部に配属される。
主に装置メーカーへの機器販売活動に従事する。その後、北海道支店、立川営業所へ赴任し、食品製造ユーザーから半導体製造装置メーカーまで幅広い顧客との活動を経験する。
1998年　株式会社山武へ社名変更。
2002年に同社制御機器事業部マーケティング部へ異動。デジタル指示調節計を中心とした新製品企画を担当する。
高精度温度制御ユニット、高機能デジタル指示調節計、電力調整器の導入企画を担当する。
2012年　アズビル株式会社へ社名変更。
現在は同社アドバスオートメーションカンパニーマーケティング部のグループマネージャーとして、デジタル指示調節計および周辺機器、燃焼安全機器の新製品企画を統括する。