| Co-Chairs |
Hidenori Kakinuma |
Toshiba Corporation |
| Eiichi Kawamura |
Fujitsu Semiconductor Ltd. |
| Vice-Chair |
Sumika Arima |
University of Tsukuba |
| Members |
Yuki Takayama |
DISCO Corporation |
| Hiromitsu Enami |
Hitachi Hi-Technologies Corporation |
| Ryuhji Tamehiro |
IBM Japan Services Company Ltd. |
| Hiroyuki Kurita |
KLA-Tencor Japan Ltd. |
| Satoshi Yasuda |
Panasonic Corporation |
| Kenji Miyake |
PMT Corporation |
| Yoshio Iwata |
Renesas Electronics Corporation |
| Toshiya Hirai |
Sony Semiconductor Corporation |
| Koichi Sakamoto |
Tokyo Electron Ltd. |
| Hisato Tanaka |
Tokyo Electron Miyagi Ltd. |
| Takashi Kurosawa |
Yamatake Corporation |
